our services

Damage prevention tube

  • Prevent tube damage due to human error..
  • Replacement work is possible while the equipment is in operation..
  • Compatible with all tube sizes.
Orders

Vision master system.

  • Wafer position inspection.
  • Inspection of cup fumes and various foreign substances.
  • Chemical dispense and flow inspection.
  • Inspection of Nozzle suck-back status and foreign substances.
Orders

Drain leak detect system

  • In the event of a small amount of leakage from the drain connection, chemical liquid can be detected.
  • If a leak occurs, the alarm goes off from the equipment and can be checked immediately.
  • Secondary accidents can be prevented in the event of a leak.
Orders

◈ Magnetic Shielding Chamber.

Sales Performance

  • A proven track record of 240 chambers supplied worldwide and 25 years of extensive experience and accumulated know-how.

Applications

 

  • High-sensitivity equipment utilizing electron beams

  • EB lithography systems, EB wafer systems, and SEM/TEM inspection equipment.

EMI Canceling System

  • By using EMI canceling coils along with an EMI canceller controller and probes, the system eliminates magnetic fields generated inside the chamber.

◈ A part selling customer.

● Major Customers

Samsung,            SK Hynix,           TEL Korea,          THK, 

KITO Korea,        Daihen Korea,     Samick,              MIRAIBO,

CUBIT.HY-LOK    etc.

● Overseas Customers

Japan Naigai Tec.

(Micron .     TEL.      EBARA.      Screen.     etc.)


China Naigai Tec.